发明名称 |
Method of cleaning workpiece with solvent and then with liquid carbon dioxide |
摘要 |
A method for precision cleaning of a workpiece with a cleaning fluid comprising liquid and/or supercritical fluid carbon dioxide and a primary solvent which is liquid at ambient temperatures and pressures comprises first placing the workpiece in a pressurizable vessel with a removable lid and within an inner tank open at the top; supplying the primary solvent to the inner tank; flushing the primary solvent through the pressure vessel; draining the inner tank to remove the primary solvent; and then supplying liquid and/or supercritical fluid carbon dioxide to the pressure vessel and flushing it through the vessel by withdrawing it from near the bottom of the inner tank.
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申请公布号 |
US5417768(A) |
申请公布日期 |
1995.05.23 |
申请号 |
US19930167403 |
申请日期 |
1993.12.14 |
申请人 |
AUTOCLAVE ENGINEERS, INC. |
发明人 |
SMITH, JR., CHARLES W.;ROSIO, LARRY R.;SHORE, STEPHEN H. |
分类号 |
B01D11/02;B08B3/08;B08B3/12;B08B7/00;C23G5/00;(IPC1-7):B08B3/08 |
主分类号 |
B01D11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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