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发明名称
INSULATING FILM FORMING METHOD
摘要
申请公布号
JPH07135208(A)
申请公布日期
1995.05.23
申请号
JP19930281029
申请日期
1993.11.10
申请人
SONY CORP
发明人
KATAOKA TOYOTAKA
分类号
H01L29/78;H01L21/31;H01L21/318;(IPC1-7):H01L21/318
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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