Chamfering machine for discs e.g. of silicon for semiconductor mfr.

摘要

The chamfering machine include a disc retaining unit consisting of a disc table (21) to hold the disc and a motor (24) to turn the disc table, together with a mechanism (25,26) to move the disc retaining unit vertically. Facing these is a chamfering unit having a grindstone (31) to chamfer the outer periphery of the disc, and a motor (34) to rotate the grindstone. A notch working unit (40), comprising a notch chamfering grindstone (41) and associated rotating motor (44), is fitted as part of the main chamfering unit, and positioned so that it does not interfere with the chamfering of the outer periphery of the disc. A further mechanism (35,36) moves the main and notch chamfering units horizontally with respect to the disc retaining unit.