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发明名称
Kammer mit einer Warm- und einer Kaltzone und mindestens mit einem Gaszuführungsrohr.
摘要
申请公布号
DE69108824(D1)
申请公布日期
1995.05.18
申请号
DE19916008824
申请日期
1991.09.17
申请人
PHILIPS ELECTRONICS N.V., EINDHOVEN, NL
发明人
FOUCHER, CLAUDE, F-75008 PARIS, FR;MALUENDA, JOSE, F-75008 PARIS, FR
分类号
C30B25/14;C30B31/16;H01L21/205;H01L21/265;H01L21/324;(IPC1-7):C30B25/14
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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