MANUFACTURE OF A WAVEGUIDE EMBEDDED AT SEVERAL DEPTHS

摘要

Method of locally embedding a waveguide (1) in a substrate (2). A mask (3) is arranged on the upper face of the substrate. An edge (9) of the mask obliquely intersects, at a low predetermined angle A, the waveguide to define a partially masked transition portion (1c) between a non-masked portion (1b) and a fully masked portion (1a) of the waveguide. After a stage in which the waveguide is embedded in the substrate, the mask (8) is withdrawn. The portion (1b) of the waveguide is thereby embedded at a depth greater than portion (1a), portion (1c) forming a gradual adiabatic transition between both portions. The method is useful in the manufacture of sensors.