Sample stage for scanning probe microscope head.

摘要

There is disclosed a sample stage of a scanning probe microscope head capable of changing the direction of a sample plane stably over a wide range in a simple operation. Fixtures 310 and 320 fix both ends of an outer flexible tube 220 of a flexible shaft 200. A displacement lead-in portion 400 displaces one end of an inner flexible tube 210 of the flexible shaft 200 relative to the outer flexible tube 220, and a displacement lead-out portion 500 and a coupling portion 600 transmit the displacement led in the inner flexible tube 210 of the flexible shaft 200 to a sample carrier portion 700 to turn the sample carrier portion 700 about a turn axis, thereby getting a sample plane to change direction.