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经营范围
发明名称
A method of controlling oxygen concentration in single crystal.
摘要
申请公布号
EP0432914(B1)
申请公布日期
1995.05.17
申请号
EP19900312542
申请日期
1990.11.16
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
ODA, TETSUHIRO;SONOKAWA, SUSUMU;OZAKI, ATSUSHI;HISAICHI, TOSHIO
分类号
C30B15/20;C30B15/00;C30B29/06;(IPC1-7):C30B15/00
主分类号
C30B15/20
代理机构
代理人
主权项
地址
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