Scanning electron microscope and image forming method therewith.

摘要

In an electron microscope for observing an image of a sample (8) using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam (2) on the sample, a low magnification and wide view image of the sample is formed on one frame memory by dividing the frame memory for storing one picture of image into 16 areas and by storing the continuous image data of the surface of the sample obtained by moving said sample into each of said 16 divided areas of the frame memory. <IMAGE>