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经营范围
发明名称
SOG REMOVING EQUIPMENT OF WAFER EDGE
摘要
申请公布号
KR950004004(Y1)
申请公布日期
1995.05.18
申请号
KR19920013354U
申请日期
1992.07.20
申请人
GOLDSTAR ELECTRON CO., LTD.
发明人
KIM, YONG - KWON
分类号
H01L21/31;H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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