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发明名称
摘要
申请公布号
JPH0746593(B2)
申请公布日期
1995.05.17
申请号
JP19840170334
申请日期
1984.08.15
申请人
发明人
分类号
H01J27/02;H01J27/08;H01J27/14;H01J37/05;H01J37/08;H01J37/248;H01J37/317;H01J49/30;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J27/02
代理机构
代理人
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地址
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