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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH07126841(A)
申请公布日期
1995.05.16
申请号
JP19930276669
申请日期
1993.11.05
申请人
IDEMITSU MATERIAL KK
发明人
KIMURA MASAKATSU;ICHITANI KATSUMI
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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