SPUTTERING DEVICE AND SPUTTERING METHOD,申请号JP19930272768-传众专利搜索

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发明名称	SPUTTERING DEVICE AND SPUTTERING METHOD
摘要
申请公布号	JPH07126846(A)	申请公布日期	1995.05.16
申请号	JP19930272768	申请日期	1993.10.29
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	SHIOKAWA AKIRA;YASUI HIDEAKI;KODERA KOICHI
分类号	C23C14/35;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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