| 摘要 |
PURPOSE:To obtain a vacuum bonding apparatus not generating the involvement of fine air bubbles, in an apparatus bonding a film to be bonded to a sheet base plate, by providing a means heating an elastomer partition wall. CONSTITUTION:A glass base plate 1 having fine-uneven patterns is placed on the lower chamber hot plate 8 of a lower pressure vacuum tank 7 and a base film 3 having a photosensitive layer is placed thereon. An upper chamber vacuum tank 4 is evacuated to uniformly bring partition rubber 6 into contact with an upper chamber hot plate 5 to close the upper chamber vacuum tank 4 heated to predetermined temp. After the lower chamber vacuum tank 7 is evacuated to a degree preventing the falling of the partition rubber 6, the vacuum degree of the tank 7 is gradually reduced to that of the upper chamber vacuum tank 4. Next, by gradually returning the pressure of the upper chamber vacuum tank 4 to atmospheric pressure, the film having the photosensitive layer is pressed to the glass base plate 1 by the elastic deformation of the partition rubber 6 so as to spread to the peripheral part of the glass base plate from the central part thereof. |
