发明名称 Semiconductor memory device with additional conductive line to prevent line breakage
摘要 A semiconductor memory device having wiring formed next to word lines at the extreme ends of the memory cell arrays or next to word lines of the dummy cell arrays, in order to prevent such word lines from breaking or from becoming deformed. The wiring is irrelevant to the circuit operation, but is provided with a fixed potential, and is formed through the steps of forming the word lines. The wiring makes the processing conditions applied to the neighboring word lines the same as the processing conditions applied to other word lines.
申请公布号 US5416347(A) 申请公布日期 1995.05.16
申请号 US19920959534 申请日期 1992.10.13
申请人 HITACHI, LTD. 发明人 KATTO, HISAO;SUGIURA, JUNE;HORINO, NOZOMI;ENDO, AKIRA;TAKEUCHI, YOSHIHARU;ARAKAWA, YUJI
分类号 G11C11/401;G11C5/02;H01L21/312;H01L21/3205;H01L21/768;H01L21/8242;H01L23/52;H01L23/522;H01L27/10;H01L27/108;H01L29/78;(IPC1-7):H01L29/772 主分类号 G11C11/401
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