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发明名称
IC TESTER
摘要
申请公布号
JPH07127880(A)
申请公布日期
1995.05.16
申请号
JP19930278782
申请日期
1993.11.09
申请人
NEC KYUSHU LTD
发明人
HIDETOKU SUSUMU
分类号
F24F3/00;F24F7/06;F25D1/00;G01R31/26;H01L21/66;(IPC1-7):F24F3/00
主分类号
F24F3/00
代理机构
代理人
主权项
地址
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