| 摘要 |
<p>PURPOSE: To deliver precise volumes of fluids without responding to back pressure by separating a first and second inner conduit surrounded by a laminated plate structure by an inner plate layer, piercing plural holes through the laminated plate layer and conveying fluids through these inner conduits and holes. CONSTITUTION: A plate layer 78 is a first conduit constituting plate layer overlapped under a top plate layer of the laminated plate structure, and has horizontal conduits 12, 10a, 10b and a horizontal conduit 104 connected to a sluice valve. A plate layer 79 lies between the first conduit constituting plate layer 78 and the second conduit constituting plate layer, and is a contacting plate layer for providing a fluid communication between a hole pair such as holes 36a, 36b and the other single hole. The second conduit constituting plate layer has a vertical conduit for supplying fluid chemicals and a vertical conduit cooperating with the sluice valve.</p> |
