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发明名称
METHOD AND INSTRUMENT FOR MEASURING LIGHT WAVE INTERFERENCE
摘要
申请公布号
JPH07120210(A)
申请公布日期
1995.05.12
申请号
JP19930264913
申请日期
1993.10.22
申请人
MITSUTOYO CORP
发明人
UEDA KANEFUMI
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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