| 摘要 |
PURPOSE:To provide a method quantatively detecting non-uniformity of quality of single crystal. CONSTITUTION:The lattice condition single crystal is photographed by X-ray topography, so as to make a negative film 51. Visible radiation from a light source 53 is cast on the negative film 51 fixed to a supporting base 52, the light transmitted through this is focused by means of a lens 54, and detected by a CCD camera 55. The detected signal of the CCD camera 55 is inputted to a computer 56, and stored in a memory 57. From this intensity distribution, dispersion of crystal quality in the direction of the crystal axis is quantitated. |
