METHOD FOR TRANSFERRING SEMICONDUCTOR WAFER,申请号JP19930287544-传众专利搜索

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发明名称	METHOD FOR TRANSFERRING SEMICONDUCTOR WAFER
摘要
申请公布号	JPH07122619(A)	申请公布日期	1995.05.12
申请号	JP19930287544	申请日期	1993.10.22
申请人	TOKYO ELECTRON LTD;TOKYO ELECTRON YAMANASHI KK	发明人	NAKAGOME TATSUYA;TOZAWA TAKASHI;SUZUKI KOJI;ISHIHARA YASUMASA;KAJIWARA MASATO
分类号	B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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