| 摘要 |
PURPOSE:To obtain an image whose linearly is high by a method wherein information on the surface of a sample is measured and changed into the image at every point in which a detected displacement coincides with a displacement at a preset measuring point. CONSTITUTION:The microscope is provided with displacement detection means which are composed of, e.g. X (and Y) sensors 13 (and 14) and X- (and Y-) displacement A/D converters 15 (and 16), with measured X- (and Y-) displacement setting means which are composed of X (and Y) target registers X (and Y) inside a microcomputer 2 and with X- (and Y-) displacement coincidence detection means which detect the coincidence between X (and Y) displacements detected by the X- (and Y-) displacement detection means and measured X- (and Y-) displacements from the X (and Y) target registers X (and Y). And, while finely and two-dimensionally a piezoelectric body 12 with a control means, it detects information on the surface of a sample 10 at a point in which the displacements detected by one or both of the X-displacement coincidence detection means and the Y-displacement coincidence detection means coincide with each other. |
