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发明名称
ROUTING METHOD FOR WIRING
摘要
申请公布号
JPH07122648(A)
申请公布日期
1995.05.12
申请号
JP19930290086
申请日期
1993.10.26
申请人
HITACHI LTD;HITACHI COMPUT ENG CORP LTD
发明人
KURATA KATSUYOSHI;KOSAKA MASAKATSU
分类号
H01L21/82;H01L27/118;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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