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发明名称
IMPURITY DIFFUSION FURNACE
摘要
申请公布号
JPH07122512(A)
申请公布日期
1995.05.12
申请号
JP19930269305
申请日期
1993.10.28
申请人
SONY CORP
发明人
HARIBUCHI HIDEO
分类号
H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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