| 摘要 |
PURPOSE:To perform the inspection for the floating and bending of leads and the measurement of the positions and attitudes of the leads of an electronic component such as a QFP in high reliability at high speed and high accuracy by integrating the detecting positions of all leads by the method of least squares, and obtaining the position and the attitude where the position deviation of the leads of the QFP becomes the minimum degree. CONSTITUTION:The operating procedure is performed as follows. Laser scanning is performed (ST31), and the detection of the position of each lead and the floating of the lead are performed (ST32). Then, the bending inspection of the lead (ST33) and the measurement of the position and attitude of the QFP (ST34) are performed. That is, laser light is applied in the direction of crossing a plurality of the leads, and the positions of all leads are detected on the basis of the reg reflected light. The detected position is cast into coordinate space expressing the center of a part for every lead. The position, where the most of the leads are cast, is detected. The inspection is performed so that the leads, which are cast on this position, are judged as non-defective and the other leads are judged as defective. The detected positions of all leads are integrated by the method of least squares, and the position and the attitude, where the position deviation of the main body of the component and the position of the lead becomes the minimum degree, is obtained. |
