发明名称 METHOD OF FABRICATING THIN FILMS AND MEMBRANES
摘要 1,208,962. Glass membrane structure. BENDIX CORP. 1 Oct., 1968 [9 Oct., 1967], No. 46472/68. Heading C1M. A thin edge-supported film or membrane is produced by providing a flat mosaic substrate 10 comprising a matrix 14 and at least one encased core member (12a, 12b); depositing a thin film coating 20 having a thickness of 100 microns or less on said substrate, and selectively removing said core(s) to produce freestanding membranes edge-supported by the matrix. Preferably both cores and matrix are of glass, while the coating may be of glass, ceramic or refractory metal. The coating is preferably by vacuum deposition, sputtering, e.g. radio-frequency plasma sputtering, or by electron beam or ion beam bombardment. The substrate may be formed by drawing a coated capillary, cutting into lengths and forming into bundles and heating, possibly under pressure, to fuse the coatings and form a matrix. The " bundles " may then be sliced into wafers whose ends are polished, and the coating deposited. Subsequently the cores, i.e. the central glass of the capillary, are removed by etching, e.g. with nitric acid. Examples of suitable glasses for cores and matrix are given.
申请公布号 GB1208962(A) 申请公布日期 1970.10.14
申请号 GB19680046472 申请日期 1968.10.01
申请人 THE BENDIX CORPORATION 发明人
分类号 G01L7/08;C03B19/00;C03B37/10;C03B37/15;C03C17/22;F16J3/02;G02B5/08;G12B1/04;H04R7/06;H04R31/00 主分类号 G01L7/08
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