申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP;PRE-TECH CO., LTD., FUCHU, TOKIO/TOKYO, JP |
发明人 |
NETSU, SHIGEYOSHI, C/O S.E.H. MALAYSIA, ULU KLANG FREE TRADE ZONE, SELANGOR, MY;KAMEYA, MASAKI, C/O S.E.H. MALAYSIA, ULU KLANG FREE TRADE ZONE, SELANGOR, MY;HARADA, YASUYUKI, TAMA-SHI, TOKYO, JP;AMANO, HIROSHI, SHIZUOKA-SHI, SHIZUOKA-KEN, JP |