发明名称 Verfahren zum Züchten eines Kristalls.
摘要 A crystal growth method comprises: applying a crystallization treatment on an amorphous film, injecting ions of the constituent material of the film into the film applied with the crystallization treatment provided with a mask to form a first region and a second region made amorphous by the ion injection, and growing a crystal from the first region to the second region by solid phase growth.
申请公布号 DE69015550(T2) 申请公布日期 1995.05.11
申请号 DE1990615550T 申请日期 1990.10.08
申请人 CANON K.K., TOKIO/TOKYO, JP 发明人 YONEHARA, TAKAO, OHTA-KU, TOKYO, JP
分类号 C30B1/10;C30B1/02;H01L21/20;H01L21/324;H01L21/84 主分类号 C30B1/10
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