发明名称 |
Verfahren zum Züchten eines Kristalls. |
摘要 |
A crystal growth method comprises: applying a crystallization treatment on an amorphous film, injecting ions of the constituent material of the film into the film applied with the crystallization treatment provided with a mask to form a first region and a second region made amorphous by the ion injection, and growing a crystal from the first region to the second region by solid phase growth. |
申请公布号 |
DE69015550(T2) |
申请公布日期 |
1995.05.11 |
申请号 |
DE1990615550T |
申请日期 |
1990.10.08 |
申请人 |
CANON K.K., TOKIO/TOKYO, JP |
发明人 |
YONEHARA, TAKAO, OHTA-KU, TOKYO, JP |
分类号 |
C30B1/10;C30B1/02;H01L21/20;H01L21/324;H01L21/84 |
主分类号 |
C30B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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