发明名称 |
A device for measuring the thickness of thin films. |
摘要 |
A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver. <IMAGE> |
申请公布号 |
EP0652415(A1) |
申请公布日期 |
1995.05.10 |
申请号 |
EP19940307593 |
申请日期 |
1994.10.17 |
申请人 |
NOVA MEASURING INSTRUMENTS LIMITED |
发明人 |
FINAROV, MOSHE |
分类号 |
G01B11/06;G01J4/00;G01N21/21;G01N21/41;G03F7/20 |
主分类号 |
G01B11/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|