| 摘要 |
<p>An array of M x N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M x N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M x N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, an array of M x N spacer members, each of the spacer members being mounted on the top surface of each of the actuating structures at the distal end thereof, and an array of M x N mirror layers for reflecting light beams, each of the mirror layers being secured on each of the spacer members of the actuating structures. An electrical signal is applied across the thin film layer of the motion-inducing material located between the pair of electrodes in each of the actuating structures, causing a deformation thereof, which will in turn tilt the mirror layer secured on the spacer member thereof. <IMAGE></p> |
