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发明名称
PRODUCTION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH07117043(A)
申请公布日期
1995.05.09
申请号
JP19930270129
申请日期
1993.10.28
申请人
KYOCERA CORP
发明人
KITAMURA TAKAAKI;HIGUMA HIROSHI
分类号
B28D5/04;H01L21/304;(IPC1-7):B28D5/04
主分类号
B28D5/04
代理机构
代理人
主权项
地址
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