| 摘要 |
PURPOSE:To simplify a process by making a washing process which is required in wet system roughening unnecessary, roughening the surface of a base material with the irradiation of an ultraviolet laser beam, and to improve the adhesion of a metallic film formed on the surface of the base material. CONSTITUTION:When irradiating the only specific area on the surface of the base material with the ultraviolet laser beam, there are the following methods. (a) By arranging a mask opened as a window at the front of the base material 1, the window corresponds to an area for forming a film, the whole surface is irradiated by the ultraviolet laser beam. (b) Scanning is performed on the mask with a beam-shape ultraviolet laser. (c) By providing a scanning mechanism such as a galvanomirror in front of the insulating base material 1, scanning is performed with a beam-shape ultraviolet laser. (d) At the state in which the surface of the base material 1 is irradiated with a beam-shape ultraviolet laser, the base material 1 is allowed to move by an X-Y table, etc., to relatively scan with the ultraviolet laser beam. |
