发明名称 Tapping atomic force microscope
摘要 An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample in contact with the sample, so that the amplitude of oscillation of the probe is changed in relation to the topography of the surface of the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. Data is obtained based either on a control signal produced to maintain the established setpoint or directly as a function of changes in the amplitude of oscillation of the probe.
申请公布号 US5412980(A) 申请公布日期 1995.05.09
申请号 US19920926175 申请日期 1992.08.07
申请人 DIGITAL INSTRUMENTS, INC. 发明人 ELINGS, VIRGIL B.;GURLEY, JOHN A.
分类号 G01B21/30;G01B7/34;G01N37/00;G01Q20/04;G01Q30/12;G01Q60/32;G01Q60/34;G01Q60/38;G01Q60/40;G01Q60/42;(IPC1-7):G01B7/34 主分类号 G01B21/30
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