发明名称 |
Enhanced imaging mode for transmission electron microscopy |
摘要 |
In the magnetic optical system of a transmission electron microscope (TEM), the increased strength of a second objective lens is used to increase the longitudinal energy dispersion by forming an image at a magnified second back-focal plane. The electric current distribution of other lenses in the microscope is reconfigured to compensate for any offsets introduced by the modified second objective lens. A plurality of deflectors are installed which enable the manipulation of the electron beam electronically between the specimen and the second back-focal plane. The magnified second back-focal plane is projected onto the selected-area aperture, allowing the use of the existing selected-area aperture as an objective aperture to achieve an energy filtering effect which improves the image contrast and resolution.
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申请公布号 |
US5414261(A) |
申请公布日期 |
1995.05.09 |
申请号 |
US19930086237 |
申请日期 |
1993.07.01 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
ELLISMAN, MARK H.;FAN, GARY G. Y.;PRICE, JEFF;SUZUKI, SEIICHI |
分类号 |
H01J37/26;(IPC1-7):H01J37/04 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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