VACUUM DEPOSITION OF COATING ON SUBSTRATE BY REACTIVE SPUTTERING,申请号JP19940077496-传众专利搜索

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发明名称	VACUUM DEPOSITION OF COATING ON SUBSTRATE BY REACTIVE SPUTTERING
摘要
申请公布号	JPH07118843(A)	申请公布日期	1995.05.09
申请号	JP19940077496	申请日期	1994.04.15
申请人	RECH E DEV DOYU GURUPU KOKERIYU SANBURU AN ABREGE R DE C S	发明人	RUNE UINAN;SUTEFUAN RIYUKA;PIEERU BUANDAN BURANDO;ARAN UEMEERUSHIYU;RIYUSHIAN RUNAARU
分类号	C23C14/34;C23C14/56;C23C16/50;H01L21/203;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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