发明名称 PRODUCTION OF LOW-RESISTANCE ZNSE SINGLE CRYSTAL SUBSTRATE
摘要 PURPOSE:To obtain a low-resistance ZnSe single crystal by dipping a ZnSe single crystal grown by solid-phase growth in a mixture of molten Zn and molten In, Ga or Al. CONSTITUTION:A ZnSe single crystal 3 grown by solid-phase growth is degreased, cleaned, then etched at 110-115 deg.C for 15min with aq. NaOH, washed with water and dried. The treated ZnSe single crystal 3 is put in a quartz ampule 1 along with a molten mixture 2 of Zn and In where In/Zn=4-50mol% (or Ga and Al) and sealed at about 10<-6>Torr. A quartz presser rod 4 is put in to prevent the floating of the ZnSe single crystal 3. The entire ampule 1 is dipped in the molten mixture 2 at 800-1000 deg.C for several to several hundred hours, and then the ZnSe single crystal 3 is separated. The resistivity of the ZnSe single crystal is lowered to <=10OMEGAcm from >=10<6>OMEGAcm before dipping.
申请公布号 JPH07118098(A) 申请公布日期 1995.05.09
申请号 JP19930287526 申请日期 1993.10.21
申请人 SUMITOMO ELECTRIC IND LTD 发明人 KURISU KENICHI
分类号 C30B29/48;C30B33/10;H01L33/28 主分类号 C30B29/48
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