发明名称 DIAMOND FILM GROWTH FROM FULLERENE PRECURSORS
摘要 <p>A method and system for manufacturing diamond film. The method involves forming a fullerene vapor (26), providing a noble gas stream (20), and combining the gas with the fullerene vapor (18), passing the combined fullerene vapor and noble gas carrier stream into a chamber (16) forming a plasma (25) in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate (24).</p>
申请公布号 WO1995012013(A1) 申请公布日期 1995.05.04
申请号 US1994012295 申请日期 1994.10.26
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