摘要 |
In a length or angle measuring device (1), operating by interference, in accordance with Figure 1, light emitted by a semiconductor light source (4) is diffracted by a plurality of gratings (2 and 3). The component beams thus generated traverse a retroreflecting element (6), are diffracted again at the said gratings (2, 3), interfere with one another and are detected by detectors (7). <IMAGE>
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申请人 |
DR. JOHANNES HEIDENHAIN GMBH, 83301 TRAUNREUT, DE |
发明人 |
FRANZ, ANDREAS, DR., 83308 TROSTBERG, DE;SPIES, ALFONS, DIPL.-ING., 83358 SEEBRUCK, DE;SPANNER, ERWIN, DIPL.-PHYS., 83278 TRAUNSTEIN, DE;HOLZAPFEL, WOLFGANG, DR., 83119 OBING, DE;HUBER, WALTER, DIPL.-ING. (FH), 83278 TRAUNSTEIN, DE |