| 摘要 |
A planar micro-motor and method of fabricating it are disclosed. The planar micro-motor comprises a stator supported by the substrate and preferably comprising a plurality of circumferentially spaced micro-coils lying in a first plane. The micro-motor also has rotor comprising a plurality of magnetic regions circumferentially spaced about a shaft for rotation in a second plane parallel to, and spaced from, the first plane. Actuating elements selectively energize subsets of the micro-coils to generate electromagnetic fields acting on the magnetic regions of the rotor across the planar gap sandwiched between the micro-coils and the rotor. The amount and direction of rotation of the rotor can be controlled. The planar micro-motor can be employed as a stepper motor. It can be fabricated using microfabrication techniques.
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