| 摘要 |
<p>PURPOSE:To prevent rotation vibration when moving a stage device. CONSTITUTION:A Y stage 2 reciprocally moves in Y axis direction on a guide surface 1a of a base 1 by three Y linear motors 3a to 3c. An X stage 4 reciprocally moves in an X axis direction along guide surfaces 2a, 2b of the stage 2 by three X linear motors 5a to 5c. Each of the Y linear motors 3a to 3c is controlled at a ratio which allows resultant of drive forced thereof to act on a center of gravity of the Y stage 2. Similarly, each of X linear motors 5a to 5c is also controlled at a ratio which allows resultant of drive forces thereof to act on a center of gravity of the X stage 4.</p> |
