| 摘要 |
PURPOSE: To perform extremely flat orthogonal motion by supporting an intermediate carriage on a base part by plural deflection members among double deflection member carriages, and supporting an inside carriage by the other plural defection members so as to be suspended under the intermediate carriage. CONSTITUTION: A double deflection member carriage 12 has a base part 24, an intermediate carriage 22, an inside carriage 26, four outside deflection members 28 and four inside deflection members 29. The carriage 22 is supported by the four members 28 so as to separate from the base part 24, and the carriage 22 and the base part 24 are respectively a parallelogram, and form a first parallelogram structure body together with the members 28. The carriage 26 is supported by the four members 29 in the shape of being suspended from the carriage 22, and the carriages 26 and 22 are respectively a parallelogram, and form a second parallelogram structure body together with the members 29. Extremely flat horizontal motion can be performed by an adjusted integral structure of this member 12. |
