发明名称 BOARD COOLING DEVICE
摘要 <p>PURPOSE:To rapidly cool a board and stop the board cooling process when the temperature reaches the desired temperature by setting the desired temperature for cooling the board and providing a cooling means to permit the cooling plate temperature lower than the target temperature. CONSTITUTION:The desired board cooling temperature TSW and initial plate temperature TSP are set. When a board is transported on the cooling plate, a Peltier element is driven by a low-temperature cooling means and cooling by the maximum power is started. Cooling continues until the device judges that the board temperature TW has reached the desired cooling temperature TSW. Maximum-power cooling is performed regardless of the output value of a plate temperature sensor unless the cooling plate is cooled to 0 deg.. Since the cooling plate is cooled by the maximum power, cooling plate temperature TP becomes lower than the desired temperature TSW and the initial temperature TSP. When the plate is cooled at high-speed and the board temperature reaches the desired temperature, the board is separated to the position that allows no influence by heat by a cooling control means.</p>
申请公布号 JPH07115058(A) 申请公布日期 1995.05.02
申请号 JP19930284518 申请日期 1993.10.18
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MATSUNAGA SANENOBU;TSUJI MASAO
分类号 G02F1/13;C30B25/12;C30B25/16;F25B21/02;G11B7/26;H01L21/027;H01L21/68;H01L21/683;H01L23/34;H01L23/38;H01L35/32;(IPC1-7):H01L21/027 主分类号 G02F1/13
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