| 摘要 |
PURPOSE:To improve efficiency in inspection and measurement by carrying out inspection object classifying work accurately and speedily. CONSTITUTION:An inspection image of a wafer 3 obtained by a CCD camera 1 and inspection information on this inspection image are recorded on an optical disk of a host computer, and an inspection image corresponding to the inspection information is searched by designating a part of the inspection information recorded on the optical disk, and is displayed on a CRT monitor 8. An inspection image under inspection at present and an inspection image read out from the optical disk are displayed on the CRT monitor 8, and are compared with each on the, and are observed, and classifying work of the wafer 3 is carried out accurately and speedily. |
