发明名称 |
Waterborne photoresists having binders with sulfonic acid functionality |
摘要 |
A waterborne photoimageable composition or photoresist comprises a latex binder polymer having acid acid functionality to render it developable in alkaline aqueous solution, at least about 50 mole percent of the acid functionality being sulfonic acid moieties, a photopolymerizeable monomer fraction, and a photoinitiator chemical system.
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申请公布号 |
US5411837(A) |
申请公布日期 |
1995.05.02 |
申请号 |
US19940241872 |
申请日期 |
1994.05.12 |
申请人 |
MORTON INTERNATIONAL, INC. |
发明人 |
BOTTOMLEY, STEPHEN E.;LUNDY, DANIEL E.;DADAH, BETSY;BARR, ROBERT K. |
分类号 |
G03F7/004;C09D4/00;C09D4/02;C09D4/06;G03F7/027;G03F7/028;G03F7/031;G03F7/033;H01L21/027;H05K3/00;H05K3/06;H05K3/18;H05K3/28;(IPC1-7):G03C1/73 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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