发明名称 Waterborne photoresists having binders with sulfonic acid functionality
摘要 A waterborne photoimageable composition or photoresist comprises a latex binder polymer having acid acid functionality to render it developable in alkaline aqueous solution, at least about 50 mole percent of the acid functionality being sulfonic acid moieties, a photopolymerizeable monomer fraction, and a photoinitiator chemical system.
申请公布号 US5411837(A) 申请公布日期 1995.05.02
申请号 US19940241872 申请日期 1994.05.12
申请人 MORTON INTERNATIONAL, INC. 发明人 BOTTOMLEY, STEPHEN E.;LUNDY, DANIEL E.;DADAH, BETSY;BARR, ROBERT K.
分类号 G03F7/004;C09D4/00;C09D4/02;C09D4/06;G03F7/027;G03F7/028;G03F7/031;G03F7/033;H01L21/027;H05K3/00;H05K3/06;H05K3/18;H05K3/28;(IPC1-7):G03C1/73 主分类号 G03F7/004
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