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发明名称
INTERFEROMETER
摘要
申请公布号
JPH07113609(A)
申请公布日期
1995.05.02
申请号
JP19930341028
申请日期
1993.12.10
申请人
NIKON CORP
发明人
GENMA TAKASHI;TOYONAGA SHUJI;ICHIHARA YUTAKA;SHIBUYA MASATO;INADA KEIJI
分类号
G01B9/02;G01B11/24;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
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