| 摘要 |
PURPOSE:To heighten inspection efficiency by keeping environments around inspection devices clean without requiring operators in the same number with the number of plural inspection devices. CONSTITUTION:Since (n+1) pieces of recorders 8, 9, 10 and 11 are provided to (n) pieces of inspection devices 1, 2 and 3, recording and reproduction are performed continuously in parallel with each other, so that micro inspections are not interrupted by replacement of semiconductor wafers by the inspection devices 1, 2 and 3. Since the semiconductor wafers are converted into image data and are set to be displayed on a single monitor 12, the semiconductor wafers can be observed in a position separated at a great distance from the inspection devices 1, 2 and 3, and operators as dust generating sources can be kept away from the periphery of the inspection devices 1, 2 and 3, and operators in the same number with the number of the inspection devices 1, 2 and 3 can be made unnecessary. |
