| 摘要 |
<p>PURPOSE:To eliminate tension irregularity of a constant tension spring automatically, to eliminate the need for large thrust margin on a drive device and to realize compactness of a device providing a stand which reciprocates and moved freely, a constant tension spring which offsets gravity of the stand by tension and a tension compensation means. CONSTITUTION:A vertical substrate stage device E-1 comprises an X stage 2 which reciprocates and moved freely, a Y stage 3 which is a stand to reciprocate and move freely in a vertical direction, a wafer chuck 4 provided to the Y stage 3, an X driving device, a linear motor 5 and a constant tension spring 6. The wafer chuck 4 moves successively by a necessary amount to an X direction and a Y direction based on a specified command signal while monitoring a position thereof by reflection light of a Y mirror 7a and an mirror 7b, and carries out movement of a wafer delivery position and positioning of each exposure region. Furthermore, a load on each linear motor 5 is reduced by offsetting gravity of an entirety of the Y stage 3 by tension of the constant tension spring 6.</p> |
