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发明名称
摘要
申请公布号
JPH0740573(B2)
申请公布日期
1995.05.01
申请号
JP19870015855
申请日期
1987.01.26
申请人
发明人
分类号
H01L21/66;H01L21/50;H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/66
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