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发明名称
摘要
申请公布号
JPH0740572(B2)
申请公布日期
1995.05.01
申请号
JP19860272727
申请日期
1986.11.14
申请人
发明人
分类号
H01L21/56;H03H3/02;(IPC1-7):H01L21/56
主分类号
H01L21/56
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