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经营范围
发明名称
REAKTIONSKAMMER UND CHEMISCHER DAMPFNIEDERSCHLAG.
摘要
申请公布号
DE3851627(T2)
申请公布日期
1995.04.27
申请号
DE19883851627T
申请日期
1988.06.17
申请人
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC., PHOENIX, ARIZ., US
发明人
OVIAS, ALBERT E., SOUTHEAST, AUMSVILLE, AZ 97325, US
分类号
C23C16/44;C23C16/455;C30B25/02;C30B25/10;H01L21/205;(IPC1-7):C23C16/52;C23C16/46;C30B25/12;C30B25/14;C30B25/16
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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