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发明名称
Verfahren zur Förderung von Chemikalienlösungen in der Halbleiterindustrie sowie Anlage zur Durchführung des Verfahrens.
摘要
申请公布号
DE59105009(D1)
申请公布日期
1995.04.27
申请号
DE19915005009
申请日期
1991.06.06
申请人
UHDE GMBH, 44141 DORTMUND, DE
发明人
VAN DEN BOSSCHE, ANDRE, W-4760 WERL, DE
分类号
B01J4/00;F04F1/12;(IPC1-7):B01J4/00
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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