发明名称 Magnetic recording medium, method for producing the same and method for forming film by plasma cvd.
摘要 A magnetic recording medium comprising a back coating layer formed on a surface reverse to a magnetic layer and a carbonaceous film which is formed on the back coating layer and contains fluorine atoms and silicon atoms and/or nitrogen atoms and in which a concentration of fluorine atoms decreases in a depth direction from a surface of the carbonaceous film, while a concentration of the silicon and/or nitrogen atoms increases in the depth direction from the surface of the carbonaceous film, which recording medium has improved running stability, durability and weatherability while electromagnetic conversion characteristics are maintained. <IMAGE>
申请公布号 EP0650158(A1) 申请公布日期 1995.04.26
申请号 EP19940116379 申请日期 1994.10.18
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 UEDA, HIDEYUKI;KUWAHARA, KENJI;SEKI, HIROSHI;TAKAHASI, KIYOSI;ODAGIRI, MASARU;MURAI, MIKIO
分类号 C23C16/50;C23C16/27;G11B5/64;G11B5/66;G11B5/72;G11B5/725;G11B5/73;G11B5/735;G11B5/84;H01L21/205 主分类号 C23C16/50
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